Equipment & System

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OLED Research System

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Various Thin Film Growth System

 -Molecular Beam Epitaxy

 -Magnetron Sputter

 -Thermal Evaporator

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Compact PECVD system

Compact Dual  Systems

A : Combined Ion Beam & PVD

B : Combined PECVD & Sputter

C : Combined RIE & Sputter

D : Combined PECVD & RIE

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PA-MOCVD  System

PE-ALD  System

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PECVD System

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Thermal Evaporator 

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Ion Beam Milling System

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Multi-probe analysis system (XPS / AES / EELS )

.XPS analysis with X-ray monochromator,

.Hemispherical analyzer, AES, ISS, .Multichannel HREELS

.Full sample preparation chamber with 

   rapid sample loading system.

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Compact LEED & AES System

.Model RVL 2000 Analyzer

.LEED, MINICMA™ Analyzer,

.NGI3000 Ion gun

.Sample Introduction System

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Sputter System

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E-Beam Evaporator

Deep RIE etcher

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Sputter System

Thermal Desorption System TDS-1000 ( TPD )

.For materials analysis

.Features a flexible design platform

Combine  LEED, AES and ion sputtering.

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DLTS (Deep Level Transient Spectroscopy)

HMS ( Hall Measurement System )

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Multi-channel HREELS system

.Model EA5000MCA 

(high resolution analyzer )

sample characterize and loading system.

Electron Sources and Ion Gun

.The-art and excellent energy resolution

.Angular dependent studies