Various Thin Film Growth System
-Molecular Beam Epitaxy
-Magnetron Sputter
-Thermal Evaporator
Compact Dual Systems
A : Combined Ion Beam & PVD
B : Combined PECVD & Sputter
C : Combined RIE & Sputter
D : Combined PECVD & RIE
PA-MOCVD System
PE-ALD System
PECVD System
Sputter System
Thermal Evaporator
E-Beam Evaporator
Ion Beam Milling System
Deep RIE etcher
Multi-probe analysis system (XPS / AES / EELS )
.XPS analysis with X-ray monochromator,
.Hemispherical analyzer, AES, ISS, .Multichannel HREELS
.Full sample preparation chamber with
rapid sample loading system.
Compact LEED & AES System
.Model RVL 2000 Analyzer
.LEED, MINICMA™ Analyzer,
.NGI3000 Ion gun
.Sample Introduction System
Sputter System
Thermal Desorption System TDS-1000 ( TPD )
.For materials analysis
.Features a flexible design platform
Combine LEED, AES and ion sputtering.
DLTS (Deep Level Transient Spectroscopy)
HMS ( Hall Measurement System )
Multi-channel HREELS system
.Model EA5000MCA
(high resolution analyzer )
sample characterize and loading system.
Electron Sources and Ion Gun
.The-art and excellent energy resolution
.Angular dependent studies