top of page

DUAL CHAMBER SYSTEMS 

Dualchamber_t.jpg

Any combination of two systems; ALD, Sputtering, Evaporation, Ion Beam Milling or Etching, RIE, PECVD found in the NM catalog can be configurated as dual system. Cost is cut by sharing pumping systems and power supplies when applicable. The chambers are isolated from each other via gate valves and can be pumped and vented individually. Load lock or in vacuum chamber-to-chamber transfer is available.

    DUAL CHAMBER System Feature and Option

FEATURES 

​

  • 26"x44" footprint with enclosed panels ideal for clean rooms

  • Fully automatic PC based, recipe driven

  • LabVIEW user interface

  • EMO protection and safety interlocks

 

​

​

Deokpyeon St 50, Baekam-myeon, Cheoin-gu, Yongin city, Gyeonggi-do  Rep. of Korea

​

Tel : +82-70-4069-2599

Email : yklee at g-trading.co.kr

​

  • Facebook Social Icon
  • Twitter Social Icon
  • Google+ Social Icon

G-Trading, Inc.

Great Global Trading

copyright©  2014-2021 by G-Trading. All Rights Reserved.

bottom of page